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Journal of the Acoustical Society of America / Volume 122 / Issue 6 / TRANSDUCTION [38]

Development of a micromachined piezoelectric microphone for aeroacoustics applications

J. Acoust. Soc. Am. Volume 122, Issue 6, pp. 3428-3436 (2007); (9 pages)

Stephen Horowitz1, Toshikazu Nishida2, Louis Cattafesta3, and Mark Sheplak3

1Department of Mechanical and Aerospace Engineering, Interdisciplinary Microsystems Group, University of Florida, Gainesville, Florida 32611-6250
2Department of Electrical and Computer Engineering, Interdisciplinary Microsystems Group, University of Florida, Gainesville, Florida 32611-6250
3Department of Mechanical and Aerospace Engineering, Interdisciplinary Microsystems Group, University of Florida, Gainesville, Florida 32611-1250

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This paper describes the design, fabrication, and characterization of a bulk-micromachined piezoelectric microphone for aeroacoustic applications. Microphone design was accomplished through a combination of piezoelectric composite plate theory and lumped element modeling. The device consists of a 1.80-mm-diam, 3-μm-thick, silicon diaphragm with a 267-nm-thick ring of piezoelectric material placed near the boundary of the diaphragm to maximize sensitivity. The microphone was fabricated by combining a sol-gel lead zirconate-titanate deposition process on a silicon-on-insulator wafer with deep-reactive ion etching for the diaphragm release. Experimental characterization indicates a sensitivity of 1.66 μV/Pa, dynamic range greater than six orders of magnitude (35.7–169 dB, re 20 μPa), a capacitance of 10.8 nF, and a resonant frequency of 59.0 kHz.

© 2007 Acoustical Society of America

ACKNOWLEDGMENTS

Financial support for this research was provided by Sandia National Laboratories and monitored by Kent Pfeifer. The authors are also grateful for significant fabrication assistance provided by Stephanie Jones of Sandia National Laboratories.

Article Outline

  1. INTRODUCTION
  2. SENSOR DESIGN
    1. Overview
    2. Lumped element model
  3. FABRICATION AND PACKAGING
  4. EXPERIMENTAL SETUP AND RESULTS
  5. CONCLUSIONS

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KEYWORDS and PACS

Keywords

aeroacoustics, microphones, piezoelectric transducers

PACS

  • 43.38.Fx

    Piezoelectric and ferroelectric transducers

  • 43.38.Kb

    Microphones and their calibration

  • 43.40.Dx

    Vibrations of membranes and plates

  • 43.38.Ar

    Transducing principles, materials, and structures: general

ARTICLE DATA

History
Received 05 Dec 2006
Accepted 24 Aug 2007
Revised 10 Jul 2007
Permalink
http://dx.doi.org/10.1121/1.2785040

PUBLICATION DATA

ISSN:

0001-4966 (print)  

Publisher:

$abstract.society.value is a Member of CrossRef Acoustical Society of America

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