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Journal of the Acoustical Society of America

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Feb 2001

Volume 109, Issue 2, pp. 439-833

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Noncontact quantitative spatial mapping of stress and flexural rigidity in thin membranes using a picosecond transient grating photoacoustic technique

John A. Rogers, Gregory R. Bogart, and Ron E. Miller

J. Acoust. Soc. Am. Volume 109, Issue 2, pp. 547-553 (2001); (7 pages)

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This paper describes a purely optical technique for measuring and spatially mapping out stress and rigidity in thin membranes. Its application to a membrane of aluminum nitride that has significant spatial nonuniformities in its elastic properties demonstrates the method. The attractive features of this technique—fast, noncontacting measurement, good spatial resolution, ability to quantify in-plane anisotropy—make it potentially useful for characterizing elements of microelectromechanical structures, masks for advanced lithography systems, acoustic filters, and other devices in which the mechanical properties of membranes are important. © 2001 Acoustical Society of America.
Show PACS
43.38.Zp Acoustooptic and photoacoustic transducers
43.35.Sx Acoustooptical effects, optoacoustics, acoustical visualization, acoustical microscopy, and acoustical holography
43.20.Ye Measurement methods and instrumentation
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